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Plasma-deposited amorphous carbon films as planarization layers
Home
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Plasma-deposited amorphous carbon films as planarization layers
Plasma-deposited amorphous carbon films as planarization layers
S. W. Pang
S. W. Pang
MH
M. W. Horn
M. W. Horn
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1 November 1990
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 8
(6)
,
1980-1984
https://doi.org/10.1116/1.584887
Abstract
No abstract available
Cited by 13 articles