Micromachined varactor with wide tuning range
- 1 January 1997
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 33 (11), 922-924
- https://doi.org/10.1049/el:19970628
Abstract
A micromachined variable capacitor that achieves a wide tuning range is proposed. The device, which was fabricated in a polysilicon surface micromachining process, has a tuning range of 25% and a quality factor of 9.6 at 1 GHz when the capacitance is tuned to 4 pF.Keywords
This publication has 2 references indexed in Scilit:
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- Silicon as a mechanical materialProceedings of the IEEE, 1982