Observation of Compositional Separation in CoCrTa Thin Film Using Transmission Electron Microscope with Imaging Filter
- 1 March 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (3B), L352
- https://doi.org/10.1143/jjap.34.l352
Abstract
The elemental mapping of a CoCrTa thin film deposited at 270° C has been performed using a transmission electron microscope equipped with an imaging filter. A compositional separation, which consists of Co-enriched areas and a Cr-enriched phase around them, is quantitatively observed. The Co-enriched areas are about 20 nm in diameter and the Cr-enriched phase extends with a two-dimensional network, which corresponds to grain boundaries. Intragrain Cr-enriched areas, which are less enriched than at the grain boundaries, are also observed.Keywords
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