Electron beam lithography: resolution limits and applications
- 1 September 2000
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 164 (1-4), 111-117
- https://doi.org/10.1016/s0169-4332(00)00352-4
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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