The Effect of Ion Bombardment on Carbon Films Prepared by Laser Evaporation
- 1 March 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (3), L194-196
- https://doi.org/10.1143/jjap.20.l194
Abstract
Carbon films have been prepared by laser evaporation of powdered graphite simultaneously with Ar ion bombardment on a deposited substrate. The effect of the ion bombardment on film properties, composition and structure has been investigated. Films with higher transmittance, resistivity and hardness are obtained by simultaneous ion bombardment, and are supposed to present a random network structure.Keywords
This publication has 3 references indexed in Scilit:
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- Electrical, structural and optical properties of amorphous carbonJournal of Non-Crystalline Solids, 1977
- Optical Harmonic Generation in Two Ferroelectric CrystalsApplied Optics, 1964