Y1Ba2Cu3O7-δ Film Formation by an OM-CVD Method
- 1 August 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (8A), L1473
- https://doi.org/10.1143/jjap.27.l1473
Abstract
In this letter, we report further studies on Y-Ba-Cu-O film formation by OM-CVD (Organometallic Chemical Vapor Deposition). Without postannealing, Y-Ba-Cu-O films grown on MgO(100) single-crystal substrates at a substrate temperature of 780°C showed an onset temperature of 85 K and zero resistance at 65 K. X-ray diffraction (XRD) patterns showed well-ordered crystallinity for films grown at substrate temperatures higher than 700°C. XRD results indicated that Y-Ba-Cu-O films with (110) orientation were grown on SrTiO3(110) single-crystal substrates.Keywords
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