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Lanthanide-incorporated metal nitrides with tunable work function and good thermal stability for NMOSdevices
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Publications
Lanthanide-incorporated metal nitrides with tunable work function and good thermal stability for NMOSdevices
Lanthanide-incorporated metal nitrides with tunable work function and good thermal stability for NMOSdevices
CR
C. Ren
C. Ren
DC
D. S. H. Chan
D. S. H. Chan
BF
B.B. Faizhal
B.B. Faizhal
ML
M.-F. Li
M.-F. Li
YY
Y.-C. Yeo
Y.-C. Yeo
AT
A.D. Trigg
A.D. Trigg
AA
A. Agarwal
A. Agarwal
NB
N. Balasubramanian
N. Balasubramanian
JP
J. S. Pan
J. S. Pan
PL
P. C. Lim
P. C. Lim
DK
D.-L. Kwong
D.-L. Kwong
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27 July 2005
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/.2005.1469204
Abstract
No abstract available
Keywords
YTTERBIUM
THERMAL STABILITY
MICROELECTRONICS
ELECTRODES
ARGON
ERBIUM
NITROGEN
WORK FUNCTION
SPUTTER DEPOSITION
DIELECTRIC MATERIALS
CMOS INTEGRATED CIRCUITS
TERBIUM
Cited by 4 articles