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Dissipation measurements of vacuum-operated single-crystal silicon microresonators
Home
Publications
Dissipation measurements of vacuum-operated single-crystal silicon microresonators
Dissipation measurements of vacuum-operated single-crystal silicon microresonators
RM
R.E. Mihailovich
R.E. Mihailovich
NM
N.C. MacDonald
N.C. MacDonald
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1 September 1995
journal article
Published by
Elsevier
in
Sensors and Actuators A: Physical
Vol. 50
(3)
,
199-207
https://doi.org/10.1016/0924-4247(96)80109-9
Abstract
No abstract available
Keywords
DISSIPATION MEASUREMENTS
MICRORESONATORS
SINGLE-CRYSTAL SILICON
Cited by 17 articles