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Electron cycloton resonance etching of aluminum alloys with BCl3–Cl2–N2
Home
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Electron cycloton resonance etching of aluminum alloys with BCl3–Cl2–N2
Electron cycloton resonance etching of aluminum alloys with BCl3–Cl2–N2
WM
William F. Marx
William F. Marx
DM
Diana X. Ma
Diana X. Ma
CC
Ching-Hwa Chen
Ching-Hwa Chen
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1 July 1992
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 10
(4)
,
1232-1237
https://doi.org/10.1116/1.578232
Abstract
No abstract available
Cited by 8 articles