Novel method to fabricate corrugation for a λ/4-shifted distributed feedback laser using a grating photomask
- 31 July 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (5), 415-417
- https://doi.org/10.1063/1.101882
Abstract
A novel method was developed to fabricate corrugation for a λ/4‐shifted distributed feedback (DFB) laser. Mechanically ruled grating patterns were transferred photolithographically to the surface of an InP substrate. The resultant λ/4‐shifted DFB laser operated in a single longitudinal mode at the Bragg wavelength.Keywords
This publication has 3 references indexed in Scilit:
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- Mechanically ruled aberration-corrected concave gratingsApplied Optics, 1980