Si/Ge nanostructures

Abstract

A review is given on the formation mechanisms and the properties of Si/Ge nanostructures that have been synthesized by self-assembling and self-ordering during heteroepitaxy of \mbox{silicon-germanium} alloys on single-crystal silicon substrates. The properties of electronic subbands in smooth strained Si/SiGe quantum well structures are presented as a basis for characterizing coherent Si/Ge nanostructures with free motion of carriers in a reduced number of dimensions. The low-dimensional band structure of valence band states confined in strained Si/Ge and Si/SiGe nanostructures is analysed by optical and electrical spectroscopy. The nanostructures presented were fabricated by self-assembly induced by elastic strain relaxation without applying any patterning technique. Misfit lattice strain of SiGe material deposited on Si substrates can relax by bunching of atomic surface steps with SiGe agglomeration at the step edges or by nucleation of Ge-rich islands in the Stranski-Krastanow growth mode. The size, density and composition of such Si/Ge nanostructures representing quantum wires and dots, respectively, can be tuned in a wide range by the growth parameters. Local strain fields extending into the Si host influence the nucleation and the lateral arrangement of nanostructures in subsequent layers and can be applied for self-ordering of nanostructures in the vertical as well as the lateral direction. Interband and intra-valence-band photocurrent, absorption and photoluminescence spectroscopy as well as C-V and admittance measurements reveal a consistent view of the band structure in Si/Ge quantum dot structures. This is in good agreement with model calculations based on band offsets, deformation potentials and effective electron masses known from earlier studies of Si/SiGe quantum well structures. The effective valence band offsets of hole states within Si/Ge nanostructures reach about 400 meV. Typical quantization energies of about 40 meV due to lateral confinement and Coulomb charging energies up to about 15 meV were observed for holes confined in 20 nm sized Si/Ge dots. Future applications of Si/Ge nanostructures such as photodetectors with improved performance or novel functionality are discussed.