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Effects of Ion Implantation on the Thermal Growth of Pt and NiPt Silicides
Home
Publications
Effects of Ion Implantation on the Thermal Growth of Pt and NiPt Silicides
Effects of Ion Implantation on the Thermal Growth of Pt and NiPt Silicides
TO
T. W. Orent
T. W. Orent
CK
C. I. Knudson
C. I. Knudson
JS
J. A. Sartell
J. A. Sartell
SL
S. Lee
S. Lee
TB
T. L. Brewer
T. L. Brewer
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1 March 1983
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 130
(3)
,
687-691
https://doi.org/10.1149/1.2119783
Abstract
No abstract available
Cited by 3 articles