Annealing of lead zirconate titanate (65/35) thin films for ultra large scale integration storage dielectric applications: Phase transformation and electrical characteristics
- 1 May 1992
- journal article
- Published by Springer Science and Business Media LLC in Journal of Electronic Materials
- Vol. 21 (5), 503-512
- https://doi.org/10.1007/bf02655617
Abstract
No abstract availableKeywords
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