Emission of excimer radiation from direct current, high-pressure hollow cathode discharges

Abstract

A novel, nonequilibrium, high-pressure,direct current discharge, the microhollow cathode discharge, has been found to be an intense source of xenon and argon excimer radiation peaking at wavelengths of 170 and 130 nm, respectively. In argon discharges with a 100 μm diam hollow cathode, the intensity of the excimer radiation increased by a factor of 5 over the pressure range from 100 to 800 mbar. In xenon discharges, the intensity at 170 nm increased by two orders of magnitude when the pressure was raised from 250 mbar to 1 bar. Sustaining voltages were 200 V for argon and 400 V for xenon discharges, at current levels on the order of mA. The resistive current–voltage characteristics of the microdischarges indicate the possibility to form arrays for direct current, flat panel excimer lamps.