Abstract
Measurements have been made of the evaporation characteristics of aluminum, alumina, aluminum nitride, barium titanate, boron carbide, boron nitride, carbon, copper, chromium, gold, iron, inconel, lead, magnesium, magnesium fluoride, molybdenum, nickel, niobium, permalloy, sapphire, silicon, silicon monoxide, silicon dioxide, silver, tantalum, tin, tin oxide, titanium, titanium monoxide, titanium dioxide, tungsten, and zinc. Using a 6-kW, 180 ° bent-beam gun, the deposition rate, required beam power, charge material form, and suitability for evaporation were determined for each material. The evaporation rate is reported in angstroms/minute. Methods of transferring these data to other guns are developed. The beam power limit is discussed and methods of increasing the evaporation rate of power limited materials are explored. Extension of these results to other materials is discussed and examples are given.