A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices
- 3 May 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 17 (1-2), 139-143
- https://doi.org/10.1016/0250-6874(89)80073-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988
- 1985 Update of the bond graph bibliographyJournal of the Franklin Institute, 1985
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969