Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Silicon Damage Caused by Hydrogen Containing Plasmas
Home
Publications
Silicon Damage Caused by Hydrogen Containing Plasmas
Silicon Damage Caused by Hydrogen Containing Plasmas
RF
R. G. Frieser
R. G. Frieser
FM
F. J. Montillo
F. J. Montillo
NZ
N. B. Zingerman
N. B. Zingerman
WC
W. K. Chu
W. K. Chu
SM
S. R. Mader
S. R. Mader
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 November 1983
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 130
(11)
,
2237-2241
https://doi.org/10.1149/1.2119559
Abstract
No abstract available
Cited by 62 articles