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Precision Electron Beam Microfabrication
Home
Publications
Precision Electron Beam Microfabrication
Precision Electron Beam Microfabrication
FO
F. S. Ozdemir
F. S. Ozdemir
WP
W. E. Perkins
W. E. Perkins
RY
R. Yim
R. Yim
EW
E. D. Wolf
E. D. Wolf
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1 November 1973
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 10
(6)
,
1008-1011
https://doi.org/10.1116/1.1318454
Abstract
A computer-controlled electron beam microfabrication system has been used to fabricate complex, high-frequency acoustic surface wave devices. System hardware and software, fabrication process, and results are described.
Keywords
ELECTRON BEAM
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Open Access
Cited by 17 articles