Micromachined flat-walled valveless diffuser pumps
- 1 June 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 6 (2), 161-166
- https://doi.org/10.1109/84.585794
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Silicon Fusion Bonding and Deep Reactive Ion Etching a New Technology for MicrostructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Fluid micropumps based on rotary magnetic actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A new micropump with bidirectional fluid transport and selfblocking effectPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A valve-less planar pump isotropically etched in siliconJournal of Micromechanics and Microengineering, 1996
- A valve-less planar fluid pump with two pump chambersSensors and Actuators A: Physical, 1995
- A bidirectional silicon micropumpPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995
- A valveless diffuser/nozzle-based fluid pumpSensors and Actuators A: Physical, 1993
- A micromachined electrohydrodynamic (EHD) pumpSensors and Actuators A: Physical, 1991
- Piezoelectric micropump with three valves working peristalticallySensors and Actuators A: Physical, 1990
- A thermopneumatic micropump based on micro-engineering techniquesSensors and Actuators A: Physical, 1990