Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Monolithically Integrable High Speed Photodetectors
Home
Publications
Monolithically Integrable High Speed Photodetectors
Monolithically Integrable High Speed Photodetectors
DJ
D J. Jackson
D J. Jackson
DP
D L. Persechini
D L. Persechini
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
23 February 1987
proceedings article
Published by
SPIE-Intl Soc Optical Eng
Vol. 716
,
104-108
https://doi.org/10.1117/12.937457
Abstract
Monolithically integrable lateral PIN detectors have been developed. The device fabrication procedure has been optimized to be compatible with standard integrated circuit fabrication procedures.© (1987) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Keywords
SENSORS
SEMICONDUCTOR MANUFACTURING
PHOTODETECTORS
FABRICATION
All Articles
Open Access
Cited by 1 article