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Assessing thermal Cl2 etching and regrowth as methods for surface passivation
Home
Publications
Assessing thermal Cl2 etching and regrowth as methods for surface passivation
Assessing thermal Cl2 etching and regrowth as methods for surface passivation
EC
E. M. Clausen
E. M. Clausen
JH
J. P. Harbison
J. P. Harbison
LF
L. T. Florez
L. T. Florez
BG
B. Van der Gaag
B. Van der Gaag
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1 November 1990
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 8
(6)
,
1960-1965
https://doi.org/10.1116/1.584883
Abstract
No abstract available
Keywords
SURFACE PASSIVATION
REGROWTH
CL2 ETCHING
ASSESSING THERMAL CL2
Cited by 18 articles