A commercial patient dose verification system utilizing non-invasive metal oxide semiconductor field effect transistor (MOSFET) dosimeters originally designed for radiotherapy applications has been evaluated for use at diagnostic energy levels. The system features multiple dosimeters that may be used to monitor entrance or exit skin dose and intracavity doses in phantoms in real time. We have characterized both the standard MOSFET dosimeter designed for radiotherapy dose verification and a newly developed “high sensitivity” MOSFET dosimeter designed for lower dose measurements. The sensitivity, linearity, angular response, postexposure response, and physical characteristics were evaluated. The average sensitivity (free in air, including backscatter) of the radiotherapy MOSFET dosimeters ranged from 3.55 × 104 mV per C kg−1 (9.2 mV R−1) to 4.87 × 104 mV per C kg−1 (12.6 mV −1) depending on the energy of the x-ray field. The sensitivity of the “high sensitivity” MOSFET dosimeters ranged from 1.15 × 105 mV per C kg−1 (29.7 mV R−1) to 1.38 × 105 mV per C kg−1 (35.7 mV R−1) depending on the energy of the x-ray field. The high sensitivity dosimeters demonstrated excellent linearity at high energies (90 and 120 kVp) and acceptable linearity at lower energies (60 kVp). The angular response was significant for free-in-air exposures, as illustrated by the sensitivity differences between the two sides of the dosimeter, but was excellent for measurements within a tissue equivalent cylinder. The post-exposure drift response is a complicated but reproducible function of time. Real-time monitoring requires little if any corrections for the postexposure drift response. The MOSFET dosimeter system brings some unique capabilities to diagnostic, radiology dqsimetry including small size, real-time capabilities, nondestructive measurement, good linearity, and a predictable angular response.