X-ray diffractometry analysis of r.f.-sputtered hard coatings based on nitrides of Ti, Cr, Hf

Publisher Website

30 September 1995

journal article
Published by Elsevier in Surface and Coatings Technology

Vol. 74-75, 279-285
https://doi.org/10.1016/0257-8972(95)08236-0

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Influence of substrate material and deposition parameters on the structure, residual stresses, hardness and adhesion of sputtered CrxNy hard coatings
Surface and Coatings Technology, 1993

Cited by 18 articles