Pyrolytic CVD of poly(organosiloxane) thin films
- 2 November 1997
- journal article
- research article
- Published by Wiley in Chemical Vapor Deposition
- Vol. 3 (6), 299-301
- https://doi.org/10.1002/cvde.19970030602
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Plasma-Polymerized Organosilicones and OrganometallicsPublished by Elsevier ,1990
- Some aspects of plasma polymerization investigated by pulsed R.F. dischargeJournal of Polymer Science: Polymer Chemistry Edition, 1977