Thermodynamic Estimation of Oxidation Ability of Various Gases Used for the Preparation of Superconducting Films at High Vacuum

Abstract
The oxidation ability of O2, O3, atomic oxygen, NO, N2O, and NO2 was estimated by thermodynamic calculation. The calculation was carried out on the equilibrium state of Cu2O/CuO, considering the temperature dependence of Gibbs free energy of formation. Gases such as NO2, O3, and atomic oxygen were proven to have oxidation abilities higher than that of O2, showing good agreement with the results of oxide film formation by molecular beam epitaxy.

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