Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Near surface damage induced in polyimides by ion beam etching
Home
Publications
Near surface damage induced in polyimides by ion beam etching
Near surface damage induced in polyimides by ion beam etching
WV
William E. Vanderlinde
William E. Vanderlinde
PM
Peter J. Mills
Peter J. Mills
EK
Edward J. Kramer
Edward J. Kramer
AR
Arthur L. Ruoff
Arthur L. Ruoff
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 September 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 3
(5)
,
1362-1364
https://doi.org/10.1116/1.582994
Abstract
No abstract available
Cited by 9 articles