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Plasma‐Developed X‐Ray Resists
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Plasma‐Developed X‐Ray Resists
Plasma‐Developed X‐Ray Resists
GT
Gary N. Taylor
Gary N. Taylor
TW
Thomas M. Wolf
Thomas M. Wolf
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1 December 1980
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 127
(12)
,
2665-2674
https://doi.org/10.1149/1.2129569
Abstract
No abstract available
Cited by 44 articles