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On the Nature of CVD Si‐Rich SiO2 and Si3 N 4 Films
Home
Publications
On the Nature of CVD Si‐Rich SiO2 and Si3 N 4 Films
On the Nature of CVD Si‐Rich SiO2 and Si3 N 4 Films
EI
E. A. Irene
E. A. Irene
NC
N. J. Chou
N. J. Chou
DD
D. W. Dong
D. W. Dong
ET
E. Tierney
E. Tierney
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1 November 1980
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 127
(11)
,
2518-2521
https://doi.org/10.1149/1.2129507
Abstract
No abstract available
Cited by 33 articles