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Kinetics of Phosphorus Predeposition in Silicon Using POCl3
Home
Publications
Kinetics of Phosphorus Predeposition in Silicon Using POCl3
Kinetics of Phosphorus Predeposition in Silicon Using POCl3
PN
P. Negrini
P. Negrini
DN
D. Nobili
D. Nobili
SS
S. Solmi
S. Solmi
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1 September 1975
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 122
(9)
,
1254-1260
https://doi.org/10.1149/1.2134437
Abstract
No abstract available
Cited by 40 articles