Applications of doping and dedoping of Teflon AF films in microfabrication using KrF and ArF excimer lasers
- 1 December 1990
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 46 (1-4), 342-347
- https://doi.org/10.1016/0169-4332(90)90167-x
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- New fluoropolymer resins are amorphousChemical & Engineering News, 1990
- Ablation of uv-transparent materials with femtosecond uv excimer laser pulsesMicroelectronic Engineering, 1989
- Excited-state and ground-state intramolecular proton-transfer reactions of 6-(2-hydroxy-5-methylphenyl)-s-triazines in poly(methyl methacrylate)The Journal of Physical Chemistry, 1985