Nitrogen Contamination in Simox Wafer
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Effects of ionizing radiation on SOI/CMOS Devices fabricated in zone-melting-recrystallized Si films on SiO2IEEE Electron Device Letters, 1984
- The Oxidation Inhibition in Nitrogen‐Implanted SiliconJournal of the Electrochemical Society, 1982
- Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor SiliconJournal of the Electrochemical Society, 1973