Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives
- 1 March 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 4 (1), 18-27
- https://doi.org/10.1109/84.365366
Abstract
No abstract availableKeywords
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