Rigid XYθ Table for Ultraprecision Machine Tool Driven by Means of Walking Drive
- 1 January 1997
- journal article
- Published by Elsevier in CIRP Annals
- Vol. 46 (1), 301-304
- https://doi.org/10.1016/s0007-8506(07)60830-0
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology (07455066)
This publication has 3 references indexed in Scilit:
- Ultraprecision Feed System Based on Walking DriveCIRP Annals, 1996
- Development of Ultraprecision Machining Center with Closed-Loop Structure and Its ControlCIRP Annals, 1995
- Positioning Table with High Accuracy and High SpeedCIRP Annals, 1990