Microfabricated scanning tunneling microscope
- 1 November 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 10 (11), 490-492
- https://doi.org/10.1109/55.43113
Abstract
A scanning tunneling microscope (STM) with dimensions 1000 mu m*200 mu m*8 mu m constructed by planar microfabrication techniques is discussed. The device incorporates a piezoelectric actuator capable of three-dimensional motion for scanning and control of the tunneling gap spacing. Operation of the device has been successfully demonstrated by imaging the surface of a graphite sample with atomic resolution.Keywords
This publication has 9 references indexed in Scilit:
- Nanometer-scale hole formation on graphite using a scanning tunneling microscopeApplied Physics Letters, 1989
- Theoretical scanning tunneling microscopy and atomic force microscopy study of graphite including tip–surface interactionJournal of Vacuum Science & Technology A, 1988
- Scanning tunneling microscopeReview of Scientific Instruments, 1987
- Scanning tunneling microscopyJournal of Applied Physics, 1987
- Vacuum Tunneling: A New Technique for MicroscopyPhysics Today, 1986
- Imaging in real time with the tunneling microscopeApplied Physics Letters, 1986
- Tunneling microscopy of graphite in airApplied Physics Letters, 1986
- Physical properties of thin-film field emission cathodes with molybdenum conesJournal of Applied Physics, 1976
- Studies of the optimum conditions for growth of rf-sputtered ZnO filmsJournal of Applied Physics, 1975