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Ion beam smoothing of indium-containing III-V compound semiconductors
Home
Publications
Ion beam smoothing of indium-containing III-V compound semiconductors
Ion beam smoothing of indium-containing III-V compound semiconductors
F. Frost
F. Frost
AS
A. Schindler
A. Schindler
FB
F. Bigl
F. Bigl
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1 June 1998
journal article
research article
Published by
Springer Nature
in
Applied Physics A
Vol. 66
(6)
,
663-668
https://doi.org/10.1007/s003390050730
Abstract
No abstract available
Keywords
PACS: 52.75.RX
81.65.CF
61.16.CH
Cited by 33 articles