Behavior of Large-Scale Surface Perturbations during Silicon Epitaxial Growth

Publisher Website

1 January 1967

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 114 (11), 1154
https://doi.org/10.1149/1.2426436

Abstract

No abstract available

Keywords

EPITAXIAL GROWTH

Cited by 8 articles