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Behavior of Large-Scale Surface Perturbations during Silicon Epitaxial Growth
Home
Publications
Behavior of Large-Scale Surface Perturbations during Silicon Epitaxial Growth
Behavior of Large-Scale Surface Perturbations during Silicon Epitaxial Growth
WR
W. R. Runyan
W. R. Runyan
EA
Earl G. Alexander
Earl G. Alexander
SC
S. E. Craig
S. E. Craig
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1 January 1967
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 114
(11)
,
1154
https://doi.org/10.1149/1.2426436
Abstract
No abstract available
Keywords
EPITAXIAL GROWTH
Cited by 8 articles