Flexural plate wave resonator excited with Lorentz forces
- 1 May 1998
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 83 (9), 4589-4601
- https://doi.org/10.1063/1.367242
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Electrostatically excited and capacitively detected flexural plate waves on thin silicon nitride membranes with chemical sensor applicationsSensors and Actuators B: Chemical, 1994
- A multisensor employing an ultrasonic Lamb-wave oscillatorIEEE Transactions on Electron Devices, 1988
- Fluid loading of a Lamb-wave sensorApplied Physics Letters, 1988