RF MEMS and NEMS technology, devices, and applications
- 17 November 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell Labs Technical Journal
- Vol. 10 (3), 29-59
- https://doi.org/10.1002/bltj.20103
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- RF MEMS for ubiquitous wireless connectivity. Part II. ApplicationIEEE Microwave Magazine, 2004
- Micromachined devices for wireless communicationsProceedings of the IEEE, 1998
- Micromechanical Membrane Switches on SiliconIBM Journal of Research and Development, 1979