An ab initio MO study of the thermal decomposition of chlorinated monosilanes, SiH4-nCln (n = 0-4)
- 1 September 1993
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
- Vol. 97 (39), 9981-9985
- https://doi.org/10.1021/j100141a015