A voltage contrast detector for the SEM
- 1 September 1975
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 8 (9), 789-793
- https://doi.org/10.1088/0022-3735/8/9/031
Abstract
A voltage contrast detector is described for measuring the potential of a sample in a scanning electron microscope by monitoring the energy shift in the differential secondary electron spectrum. The longterm stability of the measurement is +or-0.5 V and is independent of changes in topography of typical microelectronic devices. Use of this detector does not interfere with either the logical operation of the device or with the stroboscopic operation of the SEM.Keywords
This publication has 7 references indexed in Scilit:
- A technique for the linearization of voltage contrast in the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1971
- Theory of the potential probe used in static electrification measurements on insulatorsJournal of Physics E: Scientific Instruments, 1970
- Isolation of potential contrast in the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1969
- Resolution and Sensitivity Considerations of an Auger Electron Spectrometer Based on Display LEED OpticsReview of Scientific Instruments, 1969
- Improved technique for voltage measurement in the scanning-electron microscopeElectronics Letters, 1969
- Voltage measurement in the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1968
- Stroboscopic scanning electron microscopyJournal of Physics E: Scientific Instruments, 1968