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A Monte Carlo study of Si(111) surface oxidation
Home
Publications
A Monte Carlo study of Si(111) surface oxidation
A Monte Carlo study of Si(111) surface oxidation
WP
W. Porod
W. Porod
RG
R. O. Grondin
R. O. Grondin
SG
S. M. Goodnick
S. M. Goodnick
CW
C. W. Wilmsen
C. W. Wilmsen
DF
D. K. Ferry
D. K. Ferry
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1 July 1983
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 1
(3)
,
767-772
https://doi.org/10.1116/1.582689
Abstract
No abstract available
Cited by 5 articles