Photolithographic Fabrication and Physiological Performance of Microelectrode Arrays for Neural Stimulation
- 1 November 1978
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Biomedical Engineering
- Vol. BME-25 (6), 494-500
- https://doi.org/10.1109/tbme.1978.326282
Abstract
The development of an auditory cochlear prosthesis which works by direct electrical stimulation of the auditory nerve creates the need for a multielectrode stimulation array which is small in size, rugged, resistant to electrolysis, and stable and reproducible in its electrical and mechanical properties. This paper describes the fabrication of such microelectrode arrays using planar lithographic techniques.Keywords
This publication has 6 references indexed in Scilit:
- Electrochemical Considerations for Safe Electrical Stimulation of the Nervous System with Platinum ElectrodesIEEE Transactions on Biomedical Engineering, 1977
- A multiple-electrode array for a cochlear implantThe Journal of Laryngology & Otology, 1976
- A CMOS implantable multielectrode auditory stimulator for the deafIEEE Journal of Solid-State Circuits, 1975
- Symposium on cochlear implants. II. feasibility of multichannel scala tympani stimulationThe Laryngoscope, 1974
- An Evaluation of the Resistance to Electrolysis of Metals for Use in Biostimulation MicroprobesIEEE Transactions on Biomedical Engineering, 1974
- An Integrated-Circuit Approach to Extracellular MicroelectrodesIEEE Transactions on Biomedical Engineering, 1970