Cross-Sectional Transmission Electron Microscopy of Si-Based Nanostructures
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Application of the ionless tripod polisher to the preparation of YBCO superconducting multilayer and bulk ceramics thin filmsUltramicroscopy, 1995
- Selected area polishing for precision TEM sample preparationMicroscopy Research and Technique, 1993
- Specific preparation procedures for failure analysis of (sub)micron areas in silicon devicesUltramicroscopy, 1993
- A reliable method of TEM cross section specimen preparation of YBCO films on various substratesPhysica C: Superconductivity and its Applications, 1993