Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Silicon transfer layer for multilayer resist systems
Home
Publications
Silicon transfer layer for multilayer resist systems
Silicon transfer layer for multilayer resist systems
JK
J. B. Kruger
J. B. Kruger
PR
P. Rissman
P. Rissman
MC
M. S. Chang
M. S. Chang
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 November 1981
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 19
(4)
,
1320-1324
https://doi.org/10.1116/1.571268
Abstract
No abstract available
Cited by 18 articles