General inversion method for single-wavelength ellipsometry of samples with an arbitrary number of layers
- 1 June 1995
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 12 (6), 1375-1379
- https://doi.org/10.1364/josaa.12.001375
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 6 references indexed in Scilit:
- New algorithm for monochromatic ellipsometry of double absorbing layersSurface Science, 1994
- Double layer ellipsometry: an efficient numerical method for data analysisSurface Science, 1993
- Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputersSurface Science, 1988
- Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layerSurface Science, 1976
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972
- Recherches sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifiésAnnales de Physique, 1950