New algorithm for monochromatic ellipsometry of double absorbing layers
- 10 December 1994
- journal article
- Published by Elsevier BV in Surface Science
- Vol. 321 (1-2), 156-160
- https://doi.org/10.1016/0039-6028(94)90036-1
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Double layer ellipsometry: an efficient numerical method for data analysisSurface Science, 1993
- A Graphical Ellipsometric Data Reduction Algorithm and Its Application in Thin SiO2 Film MeasurementJournal of the Electrochemical Society, 1992
- Characterization of double-layer transparent films on absorbing substrates using multiple-angle ellipsometryApplied Surface Science, 1991
- Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputersSurface Science, 1988
- Ellipsometric data processing: an efficient method and an analysis of the relative errorsApplied Optics, 1985
- Method for numerical inversion of the ellipsometry equation for transparent filmsJournal of the Optical Society of America, 1983
- Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layerSurface Science, 1976
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972
- Ellipsometry of a Transparent Film Overlaid on a Transparent Substrate Having a Surface LayerOptica Acta: International Journal of Optics, 1970
- Simultaneous and Independent Determination of the Refractive Index and the Thickness of Thin Films by Ellipsometry*Journal of the Optical Society of America, 1968