Field emission from ZrC films on Si and Mo single emitters and emitter arrays

Abstract

Field emission from ZrC filmsdeposited on Si and Mo single emitters and field emitter arrays (FEAs) has been studied. For single emitters, the results show dramatic improvements in emitter performance by reducing work functions—on the order of 1 eV—and increasing stability. For FEAs,deposition of a ZrC film reduced the operating voltage 30%–50% at an emission current of 1.0 μA/tip and increased the emission stability.