Effects of thermal annealing on the structural, mechanical, and tribological properties of hard fluorinated carbon films deposited by plasma enhanced chemical vapor deposition
Open Access
- 20 October 2004
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 22 (6), 2321-2328
- https://doi.org/10.1116/1.1795833
Abstract
No abstract availableKeywords
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