The Effect of rf-Power Dissipation on the Temperature of Substrate in a rf-Sputtering System

Publisher Website

1 January 1973

journal article
Published by The Vacuum Society of Japan in SHINKU

Vol. 16 (9), 327-335
https://doi.org/10.3131/jvsj.16.327

Abstract

No abstract available

Keywords

Cited by 3 articles