Shape memory thin film of TiNi formed by sputtering
- 1 May 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 228 (1-2), 210-214
- https://doi.org/10.1016/0040-6090(93)90600-t
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Thin-film processing of TiNi shape memory alloySensors and Actuators A: Physical, 1990
- Development of Shape Memory Properties in Sputter Deposited Films of Nickel - Titanium AlloysMaterials Science Forum, 1990
- Selective thermalization in sputtering to produce high TcfilmsIEEE Transactions on Magnetics, 1975
- Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatingsJournal of Vacuum Science and Technology, 1974